空腔型薄膜体声波滤波器的关键技术进展
Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter
(a) Combination of PLD and MOCVD AlN film; (b) Bottom electrode and bonding layer sputtered on top of AlN layer; (c) Resonator structure
空腔型薄膜体声波滤波器的关键技术进展 |
| 陶桂龙, 支国伟, 罗添友, 欧阳佩东, 衣新燕, 李国强 |
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Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter |
| TAO Guilong, ZHI Guowei, LUO Tianyou, OUYANG Peidong, YI Xinyan, LI Guoqiang |
| 图14 SABAR工艺示意图[ |
| Fig. 14 Schematic diagram for SABAR process[ (a) Combination of PLD and MOCVD AlN film; (b) Bottom electrode and bonding layer sputtered on top of AlN layer; (c) Resonator structure |
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