空腔型薄膜体声波滤波器的关键技术进展
Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter
(a) Frequency impedance characteristic curves; (b) Smith chart
空腔型薄膜体声波滤波器的关键技术进展 |
| 陶桂龙, 支国伟, 罗添友, 欧阳佩东, 衣新燕, 李国强 |
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Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter |
| TAO Guilong, ZHI Guowei, LUO Tianyou, OUYANG Peidong, YI Xinyan, LI Guoqiang |
| 图13 两步法(Sample 1)和单步PVD工艺(Sample 2)所获FBAR的性能对比[ |
| Fig. 13 Performance comparison of FBAR obtained by two-step (Sample 1) and single PVD (Sample 2) processes[ (a) Frequency impedance characteristic curves; (b) Smith chart |
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