空腔型薄膜体声波滤波器的关键技术进展
Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter
(a-c) TEM dark-field images and electron diffraction patterns for 10%, 31%, and 42% Sc content; (d-f) Corresponding SEM plane views
空腔型薄膜体声波滤波器的关键技术进展 |
| 陶桂龙, 支国伟, 罗添友, 欧阳佩东, 衣新燕, 李国强 |
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Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter |
| TAO Guilong, ZHI Guowei, LUO Tianyou, OUYANG Peidong, YI Xinyan, LI Guoqiang |
| 图12 Sc掺杂量对Al1−xScxN薄膜质量及表面形貌的影响[ |
| Fig. 12 Effect of Sc-dopant concentration on crystal quality and surface morphology of Al1−xScxN thin films[ (a-c) TEM dark-field images and electron diffraction patterns for 10%, 31%, and 42% Sc content; (d-f) Corresponding SEM plane views |
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