空腔型薄膜体声波滤波器的关键技术进展
陶桂龙1,2(
), 支国伟2, 罗添友2, 欧阳佩东2, 衣新燕3, 李国强1,2,3()
), 支国伟2, 罗添友2, 欧阳佩东2, 衣新燕3, 李国强1,2,3()
Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter
TAO Guilong1,2(), ZHI Guowei2, LUO Tianyou2, OUYANG Peidong2, YI Xinyan3, LI Guoqiang1,2,3()
), ZHI Guowei2, LUO Tianyou2, OUYANG Peidong2, YI Xinyan3, LI Guoqiang1,2,3()
图12. Sc掺杂量对Al1−xScxN薄膜质量及表面形貌的影响[
Fig. 12. Effect of Sc-dopant concentration on crystal quality and surface morphology of Al1−xScxN thin films[
(a-c) TEM dark-field images and electron diffraction patterns for 10%, 31%, and 42% Sc content; (d-f) Corresponding SEM plane views
