空腔型薄膜体声波滤波器的关键技术进展
Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter
(a) Transmission response of FBAR filter; (b) Return loss of the FBAR filter
空腔型薄膜体声波滤波器的关键技术进展 |
| 陶桂龙, 支国伟, 罗添友, 欧阳佩东, 衣新燕, 李国强 |
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Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter |
| TAO Guilong, ZHI Guowei, LUO Tianyou, OUYANG Peidong, YI Xinyan, LI Guoqiang |
| 图11 基于Al0.8Sc0.2N薄膜制备的FBAR滤波器的实验结果[ |
| Fig. 11 Experimental results of FBAR filter fabricated with Al0.8Sc0.2N film[ (a) Transmission response of FBAR filter; (b) Return loss of the FBAR filter |
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