空腔型薄膜体声波滤波器的关键技术进展

陶桂龙, 支国伟, 罗添友, 欧阳佩东, 衣新燕, 李国强

Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter

TAO Guilong, ZHI Guowei, LUO Tianyou, OUYANG Peidong, YI Xinyan, LI Guoqiang

图7 BAW谐振器离散化模型及电极馈电引线[36]

Fig. 7 Discretized model and electrode feed lines of BAW resonator[36] (a) Schematic representation of discretized resonator model; (b) Two resonators in series and connected by broad lead; (c) Single resonator connected by narrow lead