空腔型薄膜体声波滤波器的关键技术进展
Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter
(a) Nonlinear circuit model; (b) Second harmonic response; (c) Third harmonic response
空腔型薄膜体声波滤波器的关键技术进展 |
| 陶桂龙, 支国伟, 罗添友, 欧阳佩东, 衣新燕, 李国强 |
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Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter |
| TAO Guilong, ZHI Guowei, LUO Tianyou, OUYANG Peidong, YI Xinyan, LI Guoqiang |
| 图4 基于AlN薄膜的BAW谐振器[ |
| Fig. 4 BAW resonator based on AlN thin film[ (a) Nonlinear circuit model; (b) Second harmonic response; (c) Third harmonic response |
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