空腔型薄膜体声波滤波器的关键技术进展
陶桂龙1,2(
), 支国伟2, 罗添友2, 欧阳佩东2, 衣新燕3, 李国强1,2,3()
), 支国伟2, 罗添友2, 欧阳佩东2, 衣新燕3, 李国强1,2,3()
Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter
TAO Guilong1,2(), ZHI Guowei2, LUO Tianyou2, OUYANG Peidong2, YI Xinyan3, LI Guoqiang1,2,3()
), ZHI Guowei2, LUO Tianyou2, OUYANG Peidong2, YI Xinyan3, LI Guoqiang1,2,3()
图2. FBAR与压电薄膜的等效电路模型
Fig. 2. FBAR and the equivalent circuit model of piezoelectric thin film
(a) Schematic structure of FBAR; (b) Mason equivalent circuit model of the piezoelectric thin film
