空腔型薄膜体声波滤波器的关键技术进展

陶桂龙, 支国伟, 罗添友, 欧阳佩东, 衣新燕, 李国强

Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter

TAO Guilong, ZHI Guowei, LUO Tianyou, OUYANG Peidong, YI Xinyan, LI Guoqiang

图2 FBAR与压电薄膜的等效电路模型

Fig. 2 FBAR and the equivalent circuit model of piezoelectric thin film (a) Schematic structure of FBAR; (b) Mason equivalent circuit model of the piezoelectric thin film