悬浮液等离子喷涂制备Y2O3涂层及耐等离子刻蚀性
马文1,2(
), 申喆1,2, 刘琪1,2, 高元明1,2, 白玉1,2, 李荣星1,2
), 申喆1,2, 刘琪1,2, 高元明1,2, 白玉1,2, 李荣星1,2
Preparation of Y2O3 Coating by Suspension Plasma Spraying and Its Resistance to Plasma Etching
MA Wen1,2(), SHEN Zhe1,2, LIU Qi1,2, GAO Yuanming1,2, BAI Yu1,2, LI Rongxing1,2
), SHEN Zhe1,2, LIU Qi1,2, GAO Yuanming1,2, BAI Yu1,2, LI Rongxing1,2
图2. 四组工艺制备Y2O3涂层的截面形貌
Fig. 2. Cross-sectional microstructures of the Y2O3 coatings prepared by four processes
(a) Process 1; (b) Process 2; (c) Process 3; (d) Process 4
