等离子体增强原子层沉积AlN外延单晶GaN研究 |
卢灏, 许晟瑞, 黄永, 陈兴, 徐爽, 刘旭, 王心颢, 高源, 张雅超, 段小玲, 张进成, 郝跃 |
Epitaxy Single Crystal GaN on AlN Prepared by Plasma-enhanced Atomic Layer Deposition |
LU Hao, XU Shengrui, HUANG Yong, CHEN Xing, XU Shuang, LIU Xu, WANG Xinhao, GAO Yuan, ZHANG Yachao, DUAN Xiaoling, ZHANG Jincheng, HAO Yue |
图10 样品a(a)和样品c(b)(002)晶面的摇摆曲线 |
Fig. 10 Rocking curves of (002) crystal plane for sample a (a) and sample c (b) |
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