皮秒激光加工的微织构对碳化硅润湿性的影响
徐昊, 钱伟, 花银群, 叶云霞, 戴峰泽, 蔡杰

Effects of Micro Texture Processed by Picosecond Laser on Hydrophobicity of Silicon Carbide
XU Hao, QIAN Wei, HUA Yinqun, YE Yunxia, DAI Fengze, CAI Jie
表1 皮秒激光加工参数
Table 1 Processing parameters of laser processing
Serial
number
Power/
W
Speed/
(mm·s-1)
Interval/
μm
A-1~A-10 9 125 64/80/100/125/150/
200/250/300/400/500
B-1~B-10 6 100 64/80/100/125/150/
200/250/300/400/500
C-1~C-10 3 50 64/80/100/125/150/
200/250/300/400/500