等离子体聚集装置下的高能量密度单晶金刚石快速生长研究

李一村, 刘雪冬, 郝晓斌, 代兵, 吕继磊, 朱嘉琦

Rapid Growth of Single Crystal Diamond at High Energy Density by Plasma Focusing

LI Yicun, LIU Xuedong, HAO Xiaobin, DAI Bing, LYU Jilei, ZHU Jiaqi

图1 3500 W, 18 kPa条件下舱体内电场强度和电子密度的分布情况仿真结果

Fig. 1 Simulation results of the distribution of electric field and electron density in the reaction chamber at 3500 W and 18 kPa (a) Electric field distribution with molybdenum disk; (b) Electric field distribution with focusing structure; (c) Electron density distribution with molybdenum disk; (d) Electron density distribution with focusing structure