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功率模块封装用高强度高热导率Si3N4陶瓷的研究进展
付师1,2(), 杨增朝1(), 李江涛1,2()
Progress of High Strength and High Thermal Conductivity Si3N4 Ceramics for Power Module Packaging
FU Shi1,2(), YANG Zengchao1(), LI Jiangtao1,2()

图1. 功率模块和金属化陶瓷基板示意图[7]

Fig. 1. Schematic diagram of power module and metallized ceramic substrate[7]