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功率模块封装用高强度高热导率Si3N4陶瓷的研究进展
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Progress of High Strength and High Thermal Conductivity Si3N4 Ceramics for Power Module Packaging
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图1. 功率模块和金属化陶瓷基板示意图[ |
Fig. 1. Schematic diagram of power module and metallized ceramic substrate[ |
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