电弧离子镀CrAlN-DLC硬质复合薄膜的成分、结构与性能
程玮杰1,2(
), 王明磊1,2, 林国强1,2()
), 王明磊1,2, 林国强1,2()
Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating
CHENG Weijie1,2(), WANG Minglei1,2, LIN Guoqiang1,2()
), WANG Minglei1,2, LIN Guoqiang1,2()
图8. CrAlN-DLC薄膜的硬度(H)和弹性模量(E)
Fig. 8. Hardness (H), elastic modulus (E) of CrAlN-DLC films
