电弧离子镀CrAlN-DLC硬质复合薄膜的成分、结构与性能
程玮杰1,2(
), 王明磊1,2, 林国强1,2()
), 王明磊1,2, 林国强1,2()
Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating
CHENG Weijie1,2(), WANG Minglei1,2, LIN Guoqiang1,2()
), WANG Minglei1,2, LIN Guoqiang1,2()
图7. CrAlN-DLC薄膜的(a) C1s, (b) Cr2p, (c) Al2p, (d) N1s XPS图谱以及(Cr9.5Al8.5N7.4)-C74.6薄膜(e) C1s, (f) Cr2p, (g) Al2p, (h) N1s XPS峰的拟合结果
Fig. 7. (a) C1s, (b) Cr2p, (c) Al2p, and (d) N1s XPS spectra of CrAlN-DLC films, and fitting results of (e) C1s, (f) Cr2p, (g) Al2p, and (h) N1s XPS peaks for (Cr9.5Al8.5N7.4)-C74.6 film
