电弧离子镀CrAlN-DLC硬质复合薄膜的成分、结构与性能
程玮杰1,2(
), 王明磊1,2, 林国强1,2()
), 王明磊1,2, 林国强1,2()
Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating
CHENG Weijie1,2(), WANG Minglei1,2, LIN Guoqiang1,2()
), WANG Minglei1,2, LIN Guoqiang1,2()
图6. (a) CrAlN-DLC薄膜的Raman谱图和(b)薄膜中ID/IG、G峰峰位以及GFWHM随碳含量的变化曲线
Fig. 6. (a) Raman spectra of CrAlN-DLC films and (b) ID/IG, G peak position and gFWHM changed with C content in the films
