电弧离子镀CrAlN-DLC硬质复合薄膜的成分、结构与性能
程玮杰1,2(
), 王明磊1,2, 林国强1,2()
), 王明磊1,2, 林国强1,2()
Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating
CHENG Weijie1,2(), WANG Minglei1,2, LIN Guoqiang1,2()
), WANG Minglei1,2, LIN Guoqiang1,2()
图2. CrAlN-DLC薄膜的表面SEM照片
Fig.2. SEM surface images of CrAlN-DLC films
(a) 1#; (b) 2#; (c) 3#; (d) 4#; (e) 5#; (f) 6#
