电弧离子镀CrAlN-DLC硬质复合薄膜的成分、结构与性能
程玮杰1,2(
), 王明磊1,2, 林国强1,2()
), 王明磊1,2, 林国强1,2()
Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating
CHENG Weijie1,2(), WANG Minglei1,2, LIN Guoqiang1,2()
), WANG Minglei1,2, LIN Guoqiang1,2()
图1. 增强磁过滤脉冲负偏压电弧离子镀膜机结构示意图
Fig.1. Schematic diagram of enhanced magnetic filtered pulse bias arc ion plating apparatus
