电弧离子镀CrAlN-DLC硬质复合薄膜的成分、结构与性能
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程玮杰, 王明磊, 林国强
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Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating
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CHENG Weijie, WANG Minglei, LIN Guoqiang
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表3 CrAlN-DLC薄膜C1s、Cr2p、Al2p以及N1s的XPS峰拟合结果(原子分数/%)
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Table 3 Fitting results of C1s, Cr2p, Al2p and N1s XPS peak of CrAlN-DLC films (atomic percentage/%)
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Area
Sample
| C1s | Cr2p | Al2p | N1s | | C-Cr | C-C | C-O | Cr-N | Cr-C | Cr-O | Cr-Cr | Al-N | Al-O | Al-Al | Cr | N-Al | | sp2 | sp3 | | (Cr29Al25.1N12.8)-C33.1 | 18.9 | 42.3 | 33.8 | 5.0 | 40.5 | 32.8 | 6.2 | 20.5 | 64.5 | 15.5 | 20.0 | 79.4 | 20.6 | | (Cr24.7Al21.9N13.7)-C39.7 | 15.4 | 43.3 | 36.0 | 5.3 | 42.6 | 35.5 | 6.9 | 16.0 | 70.9 | 14.8 | 14.3 | 73.9 | 26.1 | | (Cr18.9Al17N15)-C49.1 | 12.5 | 42.6 | 38.0 | 6.8 | 44.2 | 35.4 | 6.3 | 14.1 | 76.2 | 13.0 | 10.8 | 67.4 | 32.6 | | (Cr15.3Al14.4N16.2)-C53.9 | 9.8 | 42.7 | 40.0 | 7.5 | 47.7 | 34.6 | 6.1 | 11.6 | 78.3 | 14.2 | 7.5 | 62.8 | 37.2 | | (Cr12.4Al11.1N6.2)-C70.3 | 7.5 | 41.4 | 42.3 | 8.7 | 40.4 | 36.0 | 7.3 | 18.3 | 63.8 | 17.9 | 18.6 | 59.2 | 40.8 | | (Cr9.5Al8.5N7.4)-C74.6 | 4.3 | 39.0 | 47.0 | 10.0 | 45.0 | 31.6 | 7.7 | 15.7 | 71.7 | 17.3 | 11.0 | 55.5 | 44.5 |
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