电弧离子镀CrAlN-DLC硬质复合薄膜的成分、结构与性能

程玮杰, 王明磊, 林国强

Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating

CHENG Weijie, WANG Minglei, LIN Guoqiang

表2 不同弧流比下CrAlN-DLC薄膜的厚度

Table 2 Thickness of CrAlN-DLC films with different arc current ratios

Sample IC/ICrAl Thickness/μm CrAlN-DLC 1# 0.33 (0.99±0.03) CrAlN-DLC 2# 0.50 (1.09±0.02) CrAlN-DLC 3# 0.71 (1.09±0.02) CrAlN-DLC 4# 1.18 (1.08±0.01) CrAlN-DLC 5# 1.40 (1.02±0.02) CrAlN-DLC 6# 2.00 (1.04±0.02)