电弧离子镀CrAlN-DLC硬质复合薄膜的成分、结构与性能

程玮杰, 王明磊, 林国强

Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating

CHENG Weijie, WANG Minglei, LIN Guoqiang

表1 CrAlN-DLC薄膜的沉积参数

Table 1 Deposition parameters of CrAlN-DLC films

Sample Arc current/A Arc current ratio, IC/ICrAl Gas flow/sccm Pulsed bias Deposition time/min CrAl C N2 Ar Frequency/Hz Amplitude/V Duty cycle/% CrAlN-DLC 1# 90 30 0.33 10 90 30 -200 40 90 CrAlN-DLC 2# 80 40 0.5 10 90 30 -200 40 90 CrAlN-DLC 3# 70 50 0.71 10 90 30 -200 40 90 CrAlN-DLC 4# 55 65 1.18 10 90 30 -200 40 90 CrAlN-DLC 5# 50 70 1.4 10 90 30 -200 40 90 CrAlN-DLC 6# 40 80 2 10 90 30 -200 40 90