KH-560改性SiO2绝缘薄膜的制备及性能研究

杨丛纲, 米乐, 冯爱虎, 于洋, 孙大志, 于云

Synthesis and Performance of KH-560 Modified SiO2 Insulation Coating

YANG Conggang, MI Le, FENG Aihu, YU Yang, SUN Dazhi, YU Yun

Table 2 Sheet resistance of different SiO2 coating at different voltages

Sample Sheet resistance at 10 V/(Ω/□) Sheet resistance at 50 V/(Ω/□) Sheet resistance at 100 V/(Ω/□) SiO2-0.01 KH 1 2.33×109 3.66×108 2.92×108 2 8.68×108 4.58×108 7.56×108 3 1.59×109 5.85×108 2.61×108 Average 1.60×109 4.70×108 4.36×108 SiO2-0.02 KH 1 1.82×1010 4.92×1010 8.88×109 2 4.55×1010 3.70×1010 4.40×109 3 2.19×1010 2.71×1011 1.71×1011 Average 2.85×1010 1.19×1011 6.14×1010 SiO2-0.03 KH 1 8.71×1010 1.25×109 2.21×109 2 4.17×1010 6.55×1010 6.52×109 3 5.68×1010 8.58×109 6.02×109 Average 6.19×1010 2.51×1010 4.92×109 SiO2-0.04 KH 1 8.62×1010 2.81×1011 4.51×1010 2 3.33×1011 4.52×1010 2.76×1011 3 1.91×1011 1.56×1010 5.70×1011 Average 2.03×1011 1.14×1011 2.97×1011