KH-560改性SiO2绝缘薄膜的制备及性能研究

杨丛纲, 米乐, 冯爱虎, 于洋, 孙大志, 于云

Synthesis and Performance of KH-560 Modified SiO2 Insulation Coating

YANG Conggang, MI Le, FENG Aihu, YU Yang, SUN Dazhi, YU Yun

Table 1 Sheet resistance of different SiO2 coating

Sample Ecorr/V (vs. SEC) Icorr/(A·cm-2) Rp/(Ω·cm2) PE/% Raw soft magnetic alloy -0.973 4.0982×10-5 552.31 - SiO2-0.01 KH -0.182 7.398×10-6 8559.9 81.95 SiO2-0.02 KH -0.150 3.4603×10-7 6519.6 99.16 SiO2-0.03 KH -0.065 3.1833×10-7 22077 99.22 SiO2-0.04 KH -0.007 2.9071×10-7 76910 99.29