氢稀释比对氢化硅薄膜两相结构和电学性能的影响

鲁媛媛, 李贺军, 杨冠军

Influence of Hydrogen Dilution on Two-phase Structure and Electrical Properties of Hydrogenated Silicon Thin Films

LU Yuan-Yuan, LI He-Jun, YANG Guan-Jun

不同氢稀释比条件下硅膜的暗电导率和载流子浓度