扫描透射电子显微镜(STEM)在新一代高K栅介质材料的应用
朱信华1, 李爱东2, 刘治国2

Applications of Scanning Transmission Electron Microscopy (STEM) in the New Generation of High-K Gate Dielectrics
ZHU Xin-Hua1, LI Ai-Dong2, LIU Zhi-Guo2
图 9 a外延SiLaAlO 3 界面的HRTEM像, b HAADF-STEM像, 该图像表明界面具有一个3 × 1 的界面重构即每3个La原子中间就有一个La原子在界面处消失和c基于界面结构的Z-STEM像构筑的SiLaAlO 3 界面结构模型 [ 25 ]
Fig. 9 a HRTEM and b HAADF-STEM images from an epitaxial SiLaAlO 3 interface showing an interface reconstruction where every third La column is missing at the interface. c Interface models based on the HAADF-STEM images [ 25 ]