自组装法制备中空二氧化硅纳米粒子减反射薄膜

孙志娟, 陈雪莲, 蒋春跃

Preparation of Anti-reflection Coatings with Hollow Silica Nanoparticles by Self-assembly

SUN Zhi-Juan, CHEN Xue-Lian, JIANG Chun-Yue

图5 非酸洗a, b和酸洗c, d工艺所制备的单层减反射薄膜的SEM照片
Fig. 5 SEM images of the single-layer anti-reflection coatings by no acid pickling a, b and acid picklingc, d