紫外光辐照下钛硅共掺杂类金刚石薄膜微结构的演化
姜金龙1,2, 王琼1, 黄浩1, 张霞1, 王玉宝1, 耿庆芬2

Microstructure Evolution Induced by Ultraviolet Light Irradiation in Ti-Si Codoped Diamond-like Carbon films
JIANG Jin-Long1,2, WANG Qiong1, HUANG Hao1, ZHANG Xia1, WANG Yu-Bao1, GENG Qing-Fen2
图6 薄膜FTIR光谱a和2700~3400 cm -1 区间放大的光谱b
Fig. 6 FTIR spectra a and magnified high wavenumber region from 2700 to 3400 cm -1 in the FTIR spectra b of the film