紫外光辐照下钛硅共掺杂类金刚石薄膜微结构的演化
姜金龙1,2, 王琼1, 黄浩1, 张霞1, 王玉宝1, 耿庆芬2

Microstructure Evolution Induced by Ultraviolet Light Irradiation in Ti-Si Codoped Diamond-like Carbon films
JIANG Jin-Long1,2, WANG Qiong1, HUANG Hao1, ZHANG Xia1, WANG Yu-Bao1, GENG Qing-Fen2
图2 薄膜的HRTEM照片
Fig. 2 HRTEM image of the film