原子层沉积技术合成氧化铝薄膜包覆二硝酰胺铵
龚婷1,2, 秦利军1,2, 严蕊2, 胡岚2, 姬月萍2, 冯昊1

Alumina Thin Film Coated Ammonium Dinitramide Fabricated by
Atomic Layer Deposition
GONG Ting1,2, QIN Li-Jun1,2, YAN Rui2, HU Lan2, JI Yue-Ping2, FENG Hao1
图1 AAO表面沉积氧化锌薄膜ALD过程饱和曲线
Fig. 1 Saturation curve of ALD ZnO film growth on AAO