PECVD沉积和原位退火时间对h-BN薄膜组成及光学带隙的影响

秦毅, 赵婷, 王波, 杨建锋

Influence of Deposition andin situ Annealing Time on Composition and Optical Band Gap of h-BN Films Deposited by PECVD

QIN Yi, ZHAO Ting, WANG Bo, YANG Jian-Feng

图2 h-BN薄膜样品横截面SEM照片
Fig. 2 Cross-section SEM image of the h-BN films The inset shows the results of line scanning by EDX in the film near the BNSi interface