含Si-O-P键的减反膜结构及性能影响因素研究
王燕, 王红宁, 陈若愚

Structure of Antireflective Films with Si-O-P Bonds and Impact Factors on Its Performance
WANG Yan, WANG Hong-Ning, CHEN Ruo-Yu
图6 SiO 2 薄膜在可见光区的平均透光率随陈放时间的变化
Fig. 6 Variations of average transmittance in the visible light of SiO 2 films with exposure time