含Si-O-P键的减反膜结构及性能影响因素研究

王燕, 王红宁, 陈若愚

Structure of Antireflective Films with Si-O-P Bonds and Impact Factors on Its Performance

WANG Yan, WANG Hong-Ning, CHEN Ruo-Yu

图5 SiO 2 薄膜的表面FESEM照片a、横截面FESEM照片b、TEM照片c和AFM照片d
Fig. 5 Surface FESEM a, cross-sectional FESEM b, TEM c and AFM d images of the SiO 2 film