含Si-O-P键的减反膜结构及性能影响因素研究

王燕, 王红宁, 陈若愚

Structure of Antireflective Films with Si-O-P Bonds and Impact Factors on Its Performance

WANG Yan, WANG Hong-Ning, CHEN Ruo-Yu

图4 经不同修饰比例 n H 2 O 2 SiO 2 改性后的ACS中SiO 2 胶粒表面的Si-OH含量
Fig. 4 Si-OH content of the SiO 2 particles in modified ACS with different n H 2 O 2 SiO 2