含Si-O-P键的减反膜结构及性能影响因素研究
王燕, 王红宁, 陈若愚

Structure of Antireflective Films with Si-O-P Bonds and Impact Factors on Its Performance
WANG Yan, WANG Hong-Ning, CHEN Ruo-Yu
图3 在 n H 2 O 2 : n EtOH: n SiO 2 =0.52:30:1, 以下同 n H 3 PO 4 SiO 2 比例制备的SiO 2 薄膜在可见光区域的平均透光率
Fig. 3 Average transmittance in the visible light of the SiO 2 films with different n H 3 PO 4 SiO 2 n H 2 O 2 EtOHSiO 2 = 0.52: 30: 1