含Si-O-P键的减反膜结构及性能影响因素研究

王燕, 王红宁, 陈若愚

Structure of Antireflective Films with Si-O-P Bonds and Impact Factors on Its Performance

WANG Yan, WANG Hong-Ning, CHEN Ruo-Yu

图1 在 n H 2 O 2 ﹕ n EtOH﹕ n SiO 2 =0.52﹕30﹕1, n H 3 PO 4 SiO 2 分别为: a 0.98, b 0.49, c 0比例制备的SiO 2 凝胶的红外光谱图A和XRD图谱B
Fig. 1 FTIR spectra A and XRD patterns B of the SiO 2 gels with different n H 3 PO 4 SiO 2 A a-0, b-0.49, c-0.98; B a-0.49, b-0.98