室温下制备非晶ZnO薄膜及其电阻开关特性研究

张涛, 徐智谋, 武兴会, 刘斌昺

Deposition of Amorphous Zinc Oxide Thin Film at Room Temperature and Its Resistive Switching Characteristics

ZHANG Tao, XU Zhi-Mou, WU Xing-Hui, LIU Bin-Bing

图2 不同照射时间的氧化锌薄膜XRD图谱a、O1sb和Zn2pcXPS图谱以及不同照射时间所得薄膜的原子组成比例d
Fig. 2 XRD patterns of zinc oxide film irradiated with different time a, O1s b and Zn2p c XPS spectra of zinc oxide film and atomic composition ratios of zinc oxide film with different irradiation time d