室温下制备非晶ZnO薄膜及其电阻开关特性研究

张涛, 徐智谋, 武兴会, 刘斌昺

Deposition of Amorphous Zinc Oxide Thin Film at Room Temperature and Its Resistive Switching Characteristics

ZHANG Tao, XU Zhi-Mou, WU Xing-Hui, LIU Bin-Bing

图1 氧化锌FTO衬底的截面SEM照片
Fig. 1 SEM image of cross sectional zinc oxide film on the FTO substrate