PEALD原位掺杂制备纳米TiO2-<italic>x</italic>N<italic>x</italic>光催化剂

PEALD原位掺杂制备纳米TiO_2-_xN_x光催化剂

饶志鹏, 万军, 冯嘉恒, 李超波, 夏洋

Preparation of Nano-scaled TiO_2-_xN_x Photocatalyst by PEALDin-situDoping

RAO Zhi-Peng, WAN Jun, FENG Jia-Heng, LI Chao-Bo, XIA Yang

图6 aN掺杂及纯TiO 2 薄膜在可见光光照条件下水接触角随时间的变化; b、c掺杂功率为50 W时TiO 2- x N x 薄膜在可见光光照前后的水接触角
Fig. 6 a Variation of water contact angles on N-doped and pure TiO 2 films irradiated by visible light as a function of time. b, c Water contact angles of TiO 2- x N x films deposited at plasma power of 50 W before and after visible light irradiation