PEALD原位掺杂制备纳米TiO2-<italic>x</italic>N<italic>x</italic>光催化剂

PEALD原位掺杂制备纳米TiO_2-_xN_x光催化剂

饶志鹏, 万军, 冯嘉恒, 李超波, 夏洋

Preparation of Nano-scaled TiO_2-_xN_x Photocatalyst by PEALDin-situDoping

RAO Zhi-Peng, WAN Jun, FENG Jia-Heng, LI Chao-Bo, XIA Yang

图2 N掺杂及纯TiO 2 薄膜N1s光电子能谱
Fig. 2 XPS spectra of the N1s for N-doped and bare TiO 2 films