湿法腐蚀硅片并生长氧化锌纳米棒作为太阳能电池减反层研究

王韬, 屈新萍

Research on ZnO Nanorods Grown on Si Substrate Etched by TMAH as Si Solar Cell Antireflection Layer

WANG Tao, QU Xin-Ping

图4 TMAH腐蚀结合ZnO纳米棒生长后的硅表面反射率
Fig. 4 The reflectivity of the Si surface after etching in the TMAH for different times and growing the ZnO nanorods