湿法腐蚀硅片并生长氧化锌纳米棒作为太阳能电池减反层研究

王韬, 屈新萍

Research on ZnO Nanorods Grown on Si Substrate Etched by TMAH as Si Solar Cell Antireflection Layer

WANG Tao, QU Xin-Ping

图2 TMAH腐蚀不同时间后的硅表面与截面SEM照片
Fig. 2 Surface and cross-sectional morphologies of Si after etching in the TMAH solution for different time a 10 min; b 20 min; c 40 min