湿法腐蚀硅片并生长氧化锌纳米棒作为太阳能电池减反层研究

王韬, 屈新萍

Research on ZnO Nanorods Grown on Si Substrate Etched by TMAH as Si Solar Cell Antireflection Layer

WANG Tao, QU Xin-Ping

图1 经过不同时间TMAH腐蚀后的硅表面反射率
Fig. 1 Reflectance of the Si surface after etching in the TMAH solution for different etching time