TiN/VCN多层膜的力学性能及摩擦磨损性能研究

曹峻, 许俊华, 喻利花

Mechanical Properties and Tribological Performance of TiN/VCN Multilayers

CAO Jun, XU Jun-Hua, YU Li-Hua

图4 调制周期为10 nm的TiNVCN多层膜700℃摩擦磨损实验后磨痕照片和成分分析
Fig. 4 SEM images and EDS analysis of wear scar of TiNVCN multilayer films with 10 nm modulation periods at 700℃