TiN/VCN多层膜的力学性能及摩擦磨损性能研究

曹峻, 许俊华, 喻利花

Mechanical Properties and Tribological Performance of TiN/VCN Multilayers

CAO Jun, XU Jun-Hua, YU Li-Hua

图2 不同调制周期的TiNVCN多层膜调制比为1的显微硬度
Fig. 2 Microhardness of TiN、VCN films and TiNVCN multilayer films