TiN/VCN多层膜的力学性能及摩擦磨损性能研究

曹峻, 许俊华, 喻利花

Mechanical Properties and Tribological Performance of TiN/VCN Multilayers

CAO Jun, XU Jun-Hua, YU Li-Hua

图1 TiN、VCN及TiNVCN多层膜的XRD图谱
Fig. 1 XRD patterns of TiN、VCN films and TiNVCN multilayer films A: TiN; B:VCN; E: TiNVCN-7; F: TiNVCN-10