退火温度对Bi3.15(Eu0.7Nd0.15)Ti3O12铁电薄膜力学性能的影响

退火温度对Bi_3.15(Eu_0.7Nd_0.15)Ti₃O₁₂铁电薄膜力学性能的影响

蒋大洞, 郑学军, 龚跃球, 朱哲, 彭金峰

Effect of Annealing Temperature on the Mechanical Properties of Bi_3.15(Eu_0.7Nd_0.15)Ti₃O₁₂ Ferroelectric Thin Films

JIANG Da-Dong, ZHENG Xue-Jun, GONG Yue-Qiu, ZHU-Zhe, PENG Jin-Feng

图7 BENT薄膜的残余应力和晶粒尺寸随退火温度的变化关系
Fig. 7 Residual stress and grain size for BENT thin films as functions of annealing temperature