玻璃基掩埋式光波导堆栈的制作与表征

郑斌, 郝寅雷, 李宇波, 杨建义, 江晓清, 周强, 王明华

Manufacturing and Characterization of Buried Optical Waveguide Stack in Glass Substrate

ZHENG Bin, HAO Yin-Lei, LI Yu-Bo, YANG Jian-Yi, JIANG Xiao-Qing, ZHOU Qiang, WANG Ming-Hua

图1 掩埋式光波导堆栈的制作流程
Fig.1 Flowchart of buried optical waveguide stack manufacturing on glass substrate