用于GaN基发光二极管的蓝宝石图形衬底制备进展
崔林1, 汪桂根1, 张化宇1, 周福强1, 韩杰才1,2

Progress in Preparation of Patterned Sapphire Substrate for GaN-based Light Emitting Diodes
CUI Lin1, WANG Gui-Gen1, ZHANG Hua-Yu1, ZHOU Fu-Qiang1, HAN Jie-Cai1,2
图3 湿法刻蚀图形化蓝宝石衬底图形低放大倍数a和高放大倍数b的SEM照片 [ 41 ]
Fig. 3 SEM images at different magnifications of sapphire substrate patterned by wet etching [ 41 ]