用于GaN基发光二极管的蓝宝石图形衬底制备进展
崔林1, 汪桂根1, 张化宇1, 周福强1, 韩杰才1,2

Progress in Preparation of Patterned Sapphire Substrate for GaN-based Light Emitting Diodes
CUI Lin1, WANG Gui-Gen1, ZHANG Hua-Yu1, ZHOU Fu-Qiang1, HAN Jie-Cai1,2
图2 制备在图形化蓝宝石衬底虚线和普通蓝宝石衬底实线上GaN基发光二极管中发光射线跟踪原理图 [ 29 ]
Fig. 2 A schematic ray tracing of light for the LEDs grown on planar substrate solid line and patterned substrate dash line [ 29 ]