用于GaN基发光二极管的蓝宝石图形衬底制备进展
崔林1, 汪桂根1, 张化宇1, 周福强1, 韩杰才1,2

Progress in Preparation of Patterned Sapphire Substrate for GaN-based Light Emitting Diodes
CUI Lin1, WANG Gui-Gen1, ZHANG Hua-Yu1, ZHOU Fu-Qiang1, HAN Jie-Cai1,2
图7 六角形紧密堆积单层聚苯乙烯球a和图形化蓝宝石b衬底的SEM照片 [ 60 ]
Fig. 7 SEM images of a a hexagonal close-packed monolayer of polystyrene spheres with 500 nm diameter on top of the sapphire substrate and b NPSS [ 60 ]