拉曼面扫描表征氮掺杂6H-SiC晶体多型分布
郭啸1,2, 刘学超1, 忻隽1, 杨建华1, 施尓畏1

Characterization of Polytype Distributions in Nitrogen-doped 6H-SiC Single Crystal by Raman Mapping
GUO Xiao1,2, LIU Xue-Chao1, XIN Jun1, YANG Jian-Hua1, SHI Er-Wei1
图7 第5号晶片的LOPC峰位偏移a和半高宽分布图b
Fig. 7 Spatial characterization images of peak shift a and FWHM b of LOPC in the 5th wafer